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Solid-state nanopores are structures that can be fabricated using the electron beam of a transmission electron microscope (TEM). Nanopores can be used to electrically detect individual DNA molecules, and they have the potential to be applied to genomic sequencing. Current nanofabrication methods are manual and time-consuming, and thus, they do not allow for the fabrication of large-scale nanopore...
There is great interest in fabrication of semiconducting and piezoelectric nano-scale structures such as nanowires, nanorods and nanotubes. These find applications ranging from sensors to sub-micron electronic devices such as field effect transistors (FET), switches, memory elements, logic arrays and MEMS. In all of these diverse applications nanostructured zinc oxide (ZnO) materials attract broad...
We report a novel stress-assistant selective etching (SASE) mechanism for nanofabrication, which is discovered that tensile stress can increase dry-etching rate. By introducing patterned stress, this mechanism can realize selective etching, and be used to achieve nanostructures independent of lithography. Based on the mechanism, we employ focused ion beam (FIB) to introduce stress while milling, and...
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