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A n-/p-SOI MOSFET capped with a standard 380 Å tensile contact etching stop layer (CESL) and a 700 Å compressive CESL and with SOI thicknesses of 500/700/900 Å were measured in this paper. Additionally, external uniaxial compressive stresses with both longitudinal and transverse directions up to 45.7 MPa were applied on the devices sitting on cut silicon bars. Temperature-induced threshold voltage...
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