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The present status, successes, challenges and future of Ta2 O5, and mixed Ta2O5-based high-k layers as active component in storage capacitors of nanoscale DRAMs are discussed. The engineering of new Ta2O5-based dielectrics (doped Ta2O5 and multicomponent high-k dielectrics) as well as of metal/high-k interface in MIM capacitor configuration are identified as critical factors for further reduction...
We have used the non-contact electrical property measurement system to characterize the electrical leakage property of high-K materials such as Al2O3 and HfO2 on a patterned wafer. The basic technology is to measure the surface voltage with micro Kelvin probe after the corona charge deposition on a measurement area. Because of the charge decay through a dielectric material, voltage-time spectra follow...
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