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Traditionally, low-powered, room temperature sensing of gaseous hydrogen (H2) is difficult. With renewed interest in H2 as a source of energy, there is a need for reliable, energy-efficient sensors. A potential solution can be found in using surface acoustic wave (SAW) devices, which have been implemented as passive, wireless RFID tag-sensors. Thus, in concept, it is advantageous to develop a SAW...
Recently the portable electronic appliances have been remarkably minimized- (in weight and thickness), the assembled electric parts have also been gotten smaller and 3- dimensional and Flip-Chip bonding with solder bump haven been widely used. The 3-dimensional mounting has been put into an actual application stage. One of the important technologies for supporting these packaging is a bonding technology...
We present complex refractive index measurements of Pd and Pt films from 700-1700 nm using variable angle spectroscopic ellipsometry. Refractive index changes upon H2 gas adsorption were determined by measuring normal incidence reflection and transmission.
Capacitive humidity sensors were fabricated using countersunk interdigitated electrodes coated with amorphous nanostructured TiO2, SiO2, and Al2O3 thin films grown by glancing angle deposition. The capacitive response and response times for each sensor were measured. The sensor utilizing TiO2 exhibited the largest change in capacitance, increasing exponentially from ~ 1 nF to ~ 1muF for an increase...
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