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This paper presents a precision control circuit for the emission of desired number of electrons from vertically aligned carbon nanofibers (VACNFs) for the realization of a massively parallel maskless e-beam lithography system.The digitally addressable field emission arrays (DAFEAs) of the VACNFs function as the lithography heads for massively parallel e-beam exposure of resist eliminating the cost...
Activated carbon fibers (ACF) were prepared from polyacrylonitrile (PAN) precursor fibers by two methods: KOH activation at 400 -1000 degC and H3PO4 activation at 600-1400 V. H3PO4 activation yielded relatively poorly developed porosity regardless of the activation temperature, maintaining a low surface area (around 1000 m2g') at very high burn-off while KOH activation provided high porosities above...
Boron fibers have a significant potential to be utilized as structural components for flight / space applications. The key technical issue was to develop a cost effective method to produce continuous boron fibers. MER has accomplished success in that area by utilizing spread, low-cost PANEX 48 K carbon fibers. Subsequently, process conditions were optimized to coat about 1.5 - 2 mum boron on the carbon...
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