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A beam position monitor (BPM) with the nanometer-scale position resolution and the decay time of approximately 20 ns is developed as an interaction point BPM, to verify the nanometer stabilization of the International Linear Collider beam trains at the Accelerator Test Facility (ATF), High Energy Accelerator Research Organization (KEK). The developed low-$Q$ cavity BPM consists of a one-cell sensor...
The results of numerical investigation into the most widely used versions of near-field resonant sensors for the SMM are generalized and the main concepts of their theory are formed in the report.
A novel method to apply thin metal film for preventing footing effect in making micro-mechanical structure on SOI wafer is presented. The handle wafer of the SOI wafer was etched to form cavity by KOH solution, and followed by removing the buried oxide from backside. Then a thin aluminum film was sputtered in the cavity to prevent footing effect. The experimental results showed that the SOI micro-mechanical...
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