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The concentrated sulfuric acid is a necessary chemical for IC-Industry, especially in the wet process. The electronic grade concentrated sulfuric acid offered by major suppliers satisfies the requirements of the new technologies in metal ion impurities and insoluble particulate matters, but during the use of that offered by a core supplier in wet process, a new kind of particle contamination appeared...
Different approaches for the prediction of average Silicon Nitride cap layer thickness for the Plasma Enhanced Chemical Vapor Deposition (PECVD) dual-layer metal passivation stack process are compared, based on metrology and production equipment Fault Detection and Classification (FDC) data. Various sets of FDC parameters are processed by different prediction algorithms. In particular, the use of...
Process control is very important in the fabrication of high quality thin-film silicon solar cells. Solar cell parameters like film thickness, crystalline volume fraction or conductivity are usually measured in the back end of an industrial production line using ex-situ techniques. At the back end of solar module production the most of the money has been spent already and detrimental effects on the...
Background and details on an optimized control plan for metal contamination monitoring have been described. It must be emphasized that this control plan can only be defined and sustained through close interaction of R&D, Metrology, Process control and Production people.
Monitoring and controlling cross-wafer and in-die variability has been recognized as the dominant and escalating factors for the successful commercialization of modern-day integrated circuit products utilizing advanced semiconductor manufacturing. In this paper we present a Performance Based Metrology (PBM), a measurement technology for closing the information gap between the design, process integration,...
In the work is formalized the problem of sustainable development of production, i.e. the optimum choice of parameter values of technological process with the purpose of minimization of the risk of obtaining the production of unplanned quality and of making incorrect decision about the quality of production and maximization of production profit at the guaranteed social and economic effects. Different...
Software-based self-test (SBST) is increasingly used for testing processor cores embedded in SoCs, mainly because it allows at-speed, low-cost testing, while requiring limited (if any) hardware modifications to the original design. However, the method requires effective techniques for generating suitable test programs and for monitoring the results. In the case of processor core testing, a particularly...
This paper studies the impact of intra-die random variability on low-power digital circuit designs, specifically, circuit timing failures due to intra-die variability. We identify a new low-Vdd statistical failure mode that is strongly supply-voltage dependent and also introduce a simple yet novel method for quantifying the effects of process variability on digital timing - a delay overlapping stage...
For several decades, the output from semiconductor manufacturers has been high volume products with process optimisation being continued throughout the lifetime of the product to ensure a satisfactory yield. However, product lifetimes are continually shrinking to keep pace with market demands. Furthermore there is an increase in dasiafoundrypsila business where product volumes are low; consequently...
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