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We are introducing an innovative sacrificial surface micromachining process that enhances the robustness of freestanding microstructures and compliant mechanisms. Fabrication of a compliant mechanism using conventional sacrificial surface micromachining results in a non-planar structure with a step between the structure and its anchor. During mechanism actuation or assembly, stress accumulation at...
This paper introduces an innovative sacrificial surface micromachining process that enhances the fabrication of freestanding microstructures and compliant mechanisms. This process eliminates the topography issues related to the fabrication of these microstructures and achieves planarization without using Chemical-Mechanical Polishing (CMP). The process is based on the silicide technology, which is...
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