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AZO was sputter deposited using both RF and DC power supplies from a pre-formed ceramic AZO target with a 2 wt % aluminium oxide dopant concentration. The target was formed by hot pressing pre-doped nanoparticles produced using an emulsion detonation synthesis technique. AZO films were found to display good optical and electrical properties regardless of deposition technique. Increased temperatures...
Different nitrogen sources, pure N2, pure NO, and NO mixed with O2 (25% NO + 75% O2), are used to confirm the effects of N+, N2+, and NO+ ion implantation on the p-type conversion of ZnO:Al (AZO) films by plasma-immersion ion implantation (PIII) based on N-Al codoping mechanism. For the plasma of N2, NO, and NO mixed with O2, the major implanted ions are, respectively, N2+ ions, N2+ mixed with NO+...
Transparent and electrically conductive (TCO) thin films of ZnO:Al, ZnO:Ga and ZnO:Sc, used in solar cells as well as optoelectronic devices, have been successfully deposited by rf magnetron sputter deposition using ZnO(98%) / X2O3(2%) ceramic target, X ∈{Al, Ga, Sc}, in the inert atmosphere of argon. In this contribution we focused on the changes in physical properties and their comparison in dependence...
Multi-layered Al:ZnO thin films, with wurtzite - type structure and thickness up to 120 nm, as determined by x-ray diffraction and HRTEM, were grown on Si-SiO2 and glass substrates by the sol-gel method. Fluorescence spectroscopy measurements show that 0.5 at.% Al doping determines a blue shift of the emission band observed at 387nm in the undoped material. The room temperature conductivity increases...
P-type La0.5Sr0.5CoO3 (LSCO) and n-type 0.3 wt% Al-doped ZnO (AZO) thin films were obtained by radio-frequency magnetron sputter under different controlled Ar/O2 atmosphere. The structure of the heterojunction was p-LSCO (~125 and 250 nm)/n-AZO (~300 and 600 nm)/Si wafer and show good rectifying behavior.
Thin films of CdZnS have found extensive applications in various optical, electrical and optoelectronic devices. In the present work CdZnS (Cadmium Zinc Sulphide) thin films have been deposited by a simple, inexpensive and rapid synthesis route, microwave-assisted chemical bath deposition (MW-CBD). The bath solution is composed of Cadmium Sulphate, Zinc Sulphate, thiourea, ammonium Sulphate and ammonia...
This work reports a novel wafer-scale packaging method whereby MEMS devices are simultaneously vacuum sealed in a micromachined cavity and clad with a thin polycrystalline silicon carbide (poly-SiC) film. The deposition of poly-SiC is controlled by adjusting the precursor flow rates to yield a uniform film with low residual stress and moderate resistivity to prevent film cracking and device shorting...
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