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The aim of this paper is to develop a formalism for porous Si dielectric parameter extraction for use in RF passive device design. We show that the extracted dielectric parameters using this formalism can be reliably used to simulate the experimental behavior of coplanar waveguides and inductors. In this respect we have fabricated RF devices on porous Si, extracted the dielectric parameters of the...
This paper presents an implementation of RF passive components on a low resistivity Si substrate with a thick ajinomoto build-up film (ABF) to reduce electromagnetic field interaction with the Si substrate. The comparison of three coplanar waveguides (CPWs) on different Si substrates has been performed to provide feasibility of ABF-layer approach. After that, a bandpass filter and baluns have been...
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