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An experimental investigation on oxide positive charge buildup in sub 3-nm silicon dioxide (SiO2) films is presented during direct tunneling (DT) of electrons at -1.8 V of gate bias. The measurement results can be best explained by hole generation via anode hole injection (AHI) mechanism and the subsequent trapping of holes in the as-fabricated neutral hole traps in the oxide. A comparative study...
Evolution of electronic trap generation in the high-dielectric constant (Hkappa) layer and the interfacial layer (IL) of the Hkappa gate stack and their interdependency is examined at nanoscopic resolution using scanning tunnelling microscopy (STM). We observed experimentally (i) trap generation in the dielectric layer next to the cathode is generally mismatched with pre-existing traps in the IL which...
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