The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this work, deformation and focal length of a circular shape micro deformable mirror under different applying voltage is analyzed. This mirror has round shape. And it is circular clamped. In this work, the mirror is designed as MEMS (Micro-electro-mechanical systems) device. Therefore, it is considered to be fabricated by silicon-based micromachining. Such that, the material used as structure layer...
Capacitive micromachined ultrasonic transducer (CMUT) fabricated in standard CMOS and post-CMOS processes undergoes a series of thermal processes at about 1000degC. Thermal stress is generated in the membrane during such process. This paper studies the most severe influence of thermal stress on the performance of CMUT, such as stiffness, collapse voltage, resonant frequency, transformer ratio, coupling...
In this study, the shape and thermal effects of metal films on the stress-induced bending of micromachined curved grating are systematically investigated. The characterization of the curved grating with different shape has been performed to observe out-of-plane deformation. A finite-element model has been established to analyze such a deformation. Furthermore, the influence of postprocessing temperature...
A novel microelecromechnical system (MEMS) inertial switch based on the surface micromachining technology was developed, which mainly consists of a proof mass as the movable electrode and a compliant stationary electrode above the proof mass, whose deformation during the contact process would enhance the contact effect and prolong the switch-on time. Based on the original design which had already...
In this paper, a finite element model with in-plane and out-of-plane displacement for large deformation of the magnetostrictive thin film actuator is developed, and NiFe magnetostrictive thin film structures are fabricated with the micromachined flexible substrate using SU8-2025 and SU8-2075 (Shell Chemical Corp.). For the numerical analysis of large deformation of the magnetostrictive thin film structure,...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.