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The implementation of FINFET devices in the SRAM cell provides many benefits over that of planar bulk devices. The short channel effect, drive current and mismatch can be better controlled. Several FIN number options among PU(pull up device), PD(pull down device) and PG(pass gate device) can be selected to achieve the good read noise margin and write margin. But in highest-density SRAM cell, in order...
This paper reviews some important process aspects of aggressively downscaled FinFET technologies and their implications on digital and analog figures of merits (FOMs). The need to downscale device architectures to enhance digital transistor electrostatics and circuit density led to influences in parasitics, variability, and noise, which impact analog FOMs. Therefore, it is important to understand...
An independent-gate four-terminal FinFET SRAM have been successfully fabricated for drastic leakage current reduction. The new SRAM is consisted of a four-terminal (4T-) FinFET which has a flexible Vth controllability. The 4T-FinFET with a TiN metal gate is fabricated by a newly developed gate separation etching process. By appropriately controlling the Vth of the 4T-FinFET, we have successfully demonstrated...
While the potential of FinFETs for large-scale integration (LSI) was demonstrated before on relaxed device dimensions, in this paper we present performance data of aggressively scaled transistors, ring oscillators and SRAM cells. FinFET SRAMs are shown to have excellent VDD scalability (SNM=185 mV at 0.6 V), enabling sub-32 nm low-voltage design.
Novel 3D stacked gate-all-around multichannel CMOS architectures were developed to propose low leakage solutions and new design opportunities for sub-32 nm nodes. Those architectures offer specific advantages compared to other planar or non planar CMOS devices. In particular, ultra-low IOFF (< 20 pA/mum) and high ION (> 2.2 mA/mum) were demonstrated. Moreover, those transistors do not suffer...
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