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Slow-wave coplanar waveguides (SW-CPW) are promising candidates for realization of low-loss and compact on-chip passive components at millimeter-wave (MMW) frequencies. To meet the stringent pattern density requirement of nanoscale CMOS, two types of dummy prefills are proposed. The transmission lines achieve a measured effective dielectric permittivity of 20 and 10, an attenuation of 1 and 0.5 dB/mm,...
In this paper, experimental results of a new compact high-quality-factor shielded transmission line implemented on a CMOS 0.35-μm technology are presented, with a very good agreement between measurement and simulations. Then, based on the measured transmission line geometry, 3D electromagnetic simulations are carried out to study the effect of the floating shield dimensions and derive some design...
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