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The surface properties and performance of a biosensor’s operative element plays a decisive role in medical applications by offering a universal platform for biological and chemical sensing. It is extremely important for the surface stress biosensors, which operate via free energy change, an underlying principle in all bonding reactions. A biosensors’ surface specificity to a chosen analyte is determined...
We have been studied the sterilization of liquid using high electric field pulse. In this paper, we report the effect of temperature on survival rate in high electric field pulse sterilization. The sample was liquid medium including E. coli (JM103). Experiments were carried out at two temperatures region, room temperature region (18∼25 °C) and low temperature region (2∼5°C). Effect of pulse interval...
This article investigates the effect of protein adsorption induced surface stress on the resonant frequency of ultra-thin PZT membrane (~600 nm thick) based biosensors. The resonant frequencies of the mass sensitive micro-fabricated PZT biosensors should ideally decrease after external proteins are loaded; however, they are found to increase in this work. This abnormal phenomenon is studied by micro-Raman...
The paper deals with an application theory of elasticity in the capacitive pressure sensor. A basis of this paper has been focused to the elastic part of the described model. This model has a second part which is used for solving of electric field and electric capacity. Calculations of deformations of a silicon membrane are modeled as a three dimensional model with distribution corresponding to density...
A capacitive micromachined ultrasonic transducer (CMUT) was fabricated using a standard 0.25-mum CMOS backend-of-line process. By adopting the planarization of dielectric material between the upper and lower electrodes by chemical mechanical polishing (CMP), we achieved a time-dependent dielectric breakdown (TDDB) lifetime exceeding 10 years at a DC stress voltage of 192 V. In the case of DC and AC...
Capacitive micromachined ultrasonic transducer (CMUT) fabricated in standard CMOS and post-CMOS processes undergoes a series of thermal processes at about 1000degC. Thermal stress is generated in the membrane during such process. This paper studies the most severe influence of thermal stress on the performance of CMUT, such as stiffness, collapse voltage, resonant frequency, transformer ratio, coupling...
The charging property of dielectrics between the upper and lower electrodes in capacitive micro-machined ultrasonic transducers (CMUTs) was investigated. In particular, the dependence of the capacitance of a CMUT cell on DC voltage (i.e., C-V curve) was measured before and after DC or DC+AC voltage stress was applied between the two electrodes. The charging was evaluated from the C-V curve shift....
A novel DC-contact series RF MEMS switch using Al/Au composite membrane bridge is present. The warping problem of cantilever beam under residual stress is avoided by introduction of the slanting beam. Au-Au direct contact is achieved by using Al/Au composite membrane. The process is based on Borofloat?? glass substrate and resistance is used to isolate the crosstalk between the RF signal and DC driven...
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