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A thermo-pneumatically actuated tunable microlens has been developed as a completely integrated system with on-chip actuation and temperature sensing. The focal length of the microlens can be adjusted over a wide range without any external pressure controller. The module consists of a structured silicon chip, a spin-coated PDMS membrane, an optical fluidic chamber, a thermal cavity, and a heating...
Low-threshold lasing is achieved on compact hybrid silicon microring resonator devices (radii: 7.5, 12.5, 25 ??m) through both optical and electrical pumping. The limiting factor in scaling down for sub-mA operation is the thermal impedance.
This study investigates the performance of avalanche photodetectors (APDs) with a SiGe/Si multiple quantum well (MQW) structure, which are fabricated using an ultrahigh-vacuum chemical vapor deposition (UHV/CVD) system. SiGe MQW APD with a peak response at 1500 nm is obtained. The origin of the detection is due to optical absorption in the SiGe layers. The fabrication of the SiGe/Si MQW APD is compatible...
All-planar integration of a light source with coupling waveguide on a Si chip is achieved using high-Q, Er doped silicon-rich silicon nitride (SRSN) microdisks and SU-8 waveguide. As-fabricated microdisks show Q-factors of 1-1.5 times 104 for both TE- and TM-like modes. Upon integration with single-mode SU-8 waveguide and clad with a polymer layer, Q-factor decreases to 5,000 for the TE-like mode,...
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