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Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5-6 orders of magnitude quicker than conventional materials. This...
Using RF MEMS switches and phase shifters as examples, this paper highlights recent improvement in packaging and reliability, as well as new designs that enlarge the performance margin of RF MEMS over their transistor-based counterparts. Although additional challenges such as robustness and power handling remain, the overall picture appears bright and RF MEMS are poised for insertion into major aerospace...
To avoid the uses of multiple RF chain associated with the multiple antennas, RF switch is most essential component. Multiple antennas systems are used to replace traditional single antennas circuitry in the radio transceiver system in order to improve the transmission capability and reliability. The desired switching system must have low cost and simple structure, yet still can capture all the advantage...
Here, we propose a practical single pole double throw (SPDT)-structured radio frequency microelectromechanical system (RF MEMS) switch for RF applications. This SPDT switch has a very low insertion loss of 1.0 dB and a high isolation of 40 dB, up to 10 GHz. The fabricated switch is compact in size (5.2times3.0times1.8 mm3) with a Land Grid Array Package. The research and development of an RF MEMS...
The reliability of RF MEMS switches is typically reduced by charging effects occurring in the dielectrics. The aim of this paper is to discuss these effects, and to propose an equivalent circuit model which accounts for most of the physical contributions present in the structure.
This paper presents the effects of residual charging in dielectric less actuators of RF-MEMS ohmic switches. Indeed, in order to strongly reduce component sensitivity to charging, a dielectric less electrostatic actuator has been introduced in a conventional DC contact series MEMS relay design, resulting both in strong improvement in reliability and preservation of its intrinsic RF performance. Under...
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