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We present circuit design aspects of fully depleted extremely thin SOI (ETSOI) enabling 22 nm low-power CMOS and beyond, and demonstrate that all devices including analog, I/O, and passive devices can be fabricated in the thin silicon layer. Excellent device matching, gm/gds scaling to small gate length, good RF performance, and absence of history effect are the main features of the ETSOI technology.
A Capacitorless IT-DRAM cell using gate-induced drain leakage (GIDL) current for write operation was demonstrated for the first time on FDSOI substrate, 9.5 nm silicon film and 19 nm BOX. 20 nm gate scaling improves 20% memory effect amplitude. GIDL mechanism allows low bias, low power, fast write time and does not affect intrinsic retention time. A similar value of 10 ms at 85degC is obtained like...
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