The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A novel NiPt-silicide formation using microwave annealing (MWA) is proposed, and superior properties of NiPt silicide in ultra-shallow junction (USJ) are demonstrated for the first time. MWA is suitable for the thin NiPtSi formation with its stable and ultra-low temperature (less than 250 °C) heating. The anomalous Ni diffusion during the NiPtSi formation is considered to be suppressed because MW...
This paper presents a complete gas-sensing chip. It consists of a high-efficiency temperature control loop with a switching power stage and digital set-point and of a wide-dynamic-range interface circuit able to operate without calibration. Measurements results show that the controlled temperature of the sensor over a range of 250degC exhibits an accuracy better than 1.5degC with a maximum peak-to-peak...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.