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A new offset compensation approach for integrated thermal flow meters is described. The method is based on micromachined differential flow sensing structures with the heater split into two identical and symmetrical sections. The power unbalance between the two heaters is used to compensate the intrinsic sensor offset. The effectiveness of the approach is proven by means of experiments performed on...
A simple thermal (heat loss) sensor system was designed in a small plastic tube housing using a negative thermal coefficient (NTC) thick-film thermistor as a self-heating sensor. The voltage power supply [range constant voltage (RCV)-range constant voltage] uses the measured input water temperature to select the applied voltage in steps (up and down) in order to enable operation of the sensor at optimal...
In this paper, a platinum thin film thermal flow sensor was presented. Design, fabrication process and thermal analysis were presented and discussed. Compared with traditional structure of four supporting beams, the present structure can provide high sensitivity and good strength because of the unique thermal and mechanical design. The sizes of the flow sensor chip are 571 μ m × 280 μ m × 0.25 μ m...
Wire-mesh sensors are flow imaging devices which are able to generate images of cross-sectional phase distribution at high spatial and temporal resolution. In this paper, we introduce a novel general concept of advanced wire-mesh sensors for the measurement of other physical quantity than phase fractions. The main idea is to provide the wire crossings with miniature transducers which convert a physical...
The effectiveness of a new offset compensation technique for integrated thermal flow meters is demonstrated. A sensor structure based on two heaters placed between two temperature probes is designed with a commercial CMOS process and fabricated by means of a post-processing technique. The power unbalance between the two heaters is used to compensate the intrinsic sensor offset. Experiments, performed...
Airflow monitoring is an effective way to diagnose sleep disorders that are caused by complete or partial cessation of breathing during sleep. For monitoring airflow, a piezoelectric membrane sensor, consisting of a stainless steel foil, a piezoelectric ceramic film and a top electrode, has been developed using a sol-gel spray technique. This sensor has worked as a unimorph-type bending sensor, which...
A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminating inevitable influences of resistance...
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