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LaF3 is attractive because of its possible application at room temperature, in addition to other advantages and it has been investigated for measuring various types of gases. A solid-state gas sensor with the structure of (working electrode) SO2,Pt/LaF3/Sn,SnF2 (reference electrode) was developed for detecting sulfur dioxide at room temperature. With numerical simulation, a series of working electrodes...
This paper reports the piezoelectric properties of sputtered and sol gel PZT thin films investigated in a low thickness range (100-250 nm). Piezoelectric-elastic bimorphs including very thin PZT films were realized and the maximum reachable deflection at 5 V was characterized. The depoling effect experienced by the PZT versus the maximum post process temperature is also discussed which leads to the...
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