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We report a 8-12-μm-diameter 210-μm-length penetrating silicon probe array assembled by vapor-liquid-solid (VLS) growth, for use in multi-site recordings of neuron spikes in a brain cortex. A 3-μm-diameter silicon probe-tip metalized with platinum (Pt)-black by the electroplating, exhibits low enough probe impedance of 103 kΩ and a more than 90% output/input ratio (1 kHz) for spike recordings. Through...
This study exploits the glass reflowing technique to embed the low resistance silicon-via into glass-based microprobe shaft as electrodes. Thus four different types of electrodes could be fabricated, distributed, and integrated on glass shaft providing the flexibility for different applications. In-vitro and in-vivo (using crayfish) experiments are performed to characterize signals recorded by different...
Neuroscience and neuroprosthetic devices are increasingly in need of more compact less invasive 3-D electrode arrays for interfacing with neural tissue. To meet these needs, a folding 64-site 3-D array architecture has been developed. The microstructure, in which four probes and two platforms are fabricated as a single planar unit, results in a low-profile (<; 350-μm) narrow-platform (0.604-mm2...
This study reports a stacking method for assembling a 3-D microprobe array. To date, various 3D array structures have been reported with complex assembly steps, vertical interconnection for 3-D signal transmission which may suffer from low structure strength and large implantable opening. By applying the proposed stacking method, the previous problems were no longer existed. Also, ASIC chips could...
Exploration into electrical stimulation of the retina has thus far focussed primarily upon the development of prostheses targeted at one of two sites of intervention - the epi- and sub-retinal surfaces. These two approaches have sound, logical merit owing to their proximity to retinal neurons and their potential to deliver stimuli via the surviving retinal neural networks respectively. There is increasing...
We report in-vitro multisite field potential recordings from fish retina using a vertically integrated silicon (Si) microprobe array. Eight active channels of the enlarged probe-head ldquoKokeshi (Japanese dolls)rdquo type Si probe enabled multisite electrical recordings of retinal responses (electroretinograms (ERGs)) to white light stimuli. The ERG a- and b-waves were obtained at each probe, and...
This paper presents a very thin silicon dioxide microtube electrode array, which has sub ten-micrometers in inner diameter, as a neural interface device with high signal-to-noise ratio and low invasiveness. The device was realized by using out-of-plane silicon dioxide microtube arrays fabricated from vapor-liquid-solid growth and microfabrication techniques. Here we report advantages of electrical...
A brand-new flexible microelectrodes array device is made with silicon and polymer MEMS technology. The device can ldquowraprdquo a single axon of a neuron with uniform curvature radius predefined by the integrated ldquocurvature limiterrdquo. The device can measure 3-dimensional potential distribution around the axon surface. By this we are intending to verify if the assumption that an axon works...
Neurons modify their activity through synaptic and intrinsic plasticity mechanisms induced by afferent input and temper these changes through homeostatic mechanisms. Consequently, most cortical neurons tend to fire within a frequency range of a few Hertz. While comparisons of firing rates have been used to show plasticity in intracellular recordings of individual neurons, we previously found that...
This paper reports on a novel CMOS-based high-density silicon microprobe array for intracortical recording applications. In contrast to existing systems, CMOS multiplexing units are integrated on the slender, needle-like probe shaft 160 mum in width. In the present implementation an unequaled number of 188 electrodes (diameter 20 mum, pitch 40 mum) are arranged in two columns along the 4-mm-long probe...
We present a process for fabricating a nanoscale probing device for in vitro sensing of neural activity. Single vertical platinum (Pt) nanowires were fabricated on a microelectrode array by focused ion beam (FIB)-chemical vapor deposition (CVD) in order to improve the spatial resolution of recording and to minimize damage to the cells. Electrodes in contact with cells detected prominent spontaneous...
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