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We report on the degenerate doping of a silicon resonator as a new method for reducing its temperature coefficient of frequency (TCF). This is the first TCF reduction technique reported till date that takes advantage of free charge carrier effects on the elastic constants of silicon. The TCF of silicon bulk acoustic resonators (SiBAR) are reduced from -29 ppm/??C to -1.5 ppm/??C on 5 ??m thick devices...
The present paper focuses on the study of electrical and physico-chemical properties of films deposited by Low Pressure Chemical Vapor Deposition or (LPCVD). These films are composed of two layers, boron doped polysilicon (polySi) and nitrogen doped polysilicon (NIDOS). The results indicate that the resistivity values increases versus increasing of the annealing duration, this can be explained by...
Polycrystalline silicon (polysilicon) has been used as an important structural material for microelectromechnical systems (MEMS) because of its compatibility with standard integrated circuit (IC) processes. As the structural layer of micromechanical high resonance frequency (high-f) and high quality factor (high-Q) disk resonators, the low residual stress and low resistivity are desired for the polysilicon...
Optimized chemical structure was proposed for boron-doped Si quantum dots superlattices. Boron-doped Si quantum dots superlattices were then synthesized by a co-sputtering technique, and characterized for their promising application in all-Si tandem solar cells. The formation of Si quantum dots was confirmed by transmission electron microscopy. The effect of boron dopant concentration on the Si crystallization...
B-doped mc-Si solar cells with different positions of the ingot are used to investigate the initial rapid light-induced degradation of cell performance. Efficiencies of solar cells from the bottom of the ingot with resistivity of 1.64 /spl Omega//spl middot/cm and oxygen concentration of 0.48 ppma degrade to about 3% of its initial values. Illumination with light intensities between 1 to 100 mW/cm/sup...
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