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This paper presents a microelectromechanical systems sensor for differential scanning calorimetry (DSC) of liquid-phase biomolecular samples. The device consists of two microchambers, each of which is based on a freestanding polyimide diaphragm and surrounded by air cavities for thermal isolation. The chambers are each equipped with a thin-film gold resistive heater and temperature sensor and are...
Due to the miniaturization seen in the last decades, several macro models that neglect parameters have to be revised in order to evaluate the behavior of different types of microsystems. In this paper we present the analysis of one such parameter which affects the thermal functionality, namely, the convection of natural gases. In macro scale this parameter is usually neglected, because the conductivity...
We evaluated thermal conduction of a single carbon nanotube (CNT) in air. Heating the end of the CNT locally by a microheater, we measured temperature dependence of electrical resistance of the single CNT. First, we fabricated the microheater for local heating and four electrodes for electrical resistance measurement on a Silicon on Insulator (SOI) wafer and made a gap for heat insulation. The effectiveness...
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