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A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.
This study demonstrates a novel monolithic TPMS (tire pressure monitoring systems) using CMOS MEMS processes. This TPMS monolithic integrates the 3-axis capacitive accelerometer, capacitive pressure sensor, and platinum (Pt) thermal-resist temperature sensor on a single chip. The TPMS has been successfully implemented using TSMC 2P4M process and our in-house post-process. The footprint of TPMS chip...
We present an advantageous fabrication technology for the integration of pressure sensor into the multi-sensor for micro weather station. Differing from traditional silicon piezoresistive or capacitive pressure sensor, we use platinum piezoresistive pressure sensor in the integration, which can greatly simplify the whole process and also has an excellent performance. We also use adhesive bonding with...
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