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In this paper, a new design for MEMS capacitive pressure sensor is presented. In this study, we have examined a new electrode configuration in the capacitive sensing pressure sensor where the membrane deformation affects electrodes overlapping area rather than their separation in the commercial sensors. We showed this modification improves sensitivity with a linear operation. Here, we proposed a new...
This paper reports the design and theoretical calculation of a capacitive ultra-low pressure sensor, which is based on circular suspend graphene diaphragm array. The atom scale thickness and high mechanical strength of suspend graphene diaphragm both contribute to ultra-low pressure measure range. As the size of single suspend graphene diaphragm is limited by fabrication process, a parallel connected...
Capacitive pressure sensors can be used for touch mode applications with pressure ranging from 0.05 MPa to 2 MPa. This paper provides the information about the variation in dynamic range of a MEMS capacitive pressure sensor when its sensitivity is improved. The shape of the capacitive pressure sensor diaphragm is changed from normal flat diaphragm to a centre bossed structure and was found that Bossed...
This study presents the effect of the additional air chamber on the sensitivity of an air-sealed capacitive pressure sensor having a flexible diaphragm investigated theoretical analysis, FEA, and experimental validation. First, the sensitivity variation of the capacitive pressure sensor having a various volume of the air chamber has been verified by analytical method as theoretical approach and FEM...
We introduce a novel, microfluidic capacitive pressure sensor which uses a high capacitance per unit area at the interface between the metal and ionic liquid. Unlike traditional pressure sensors, which use rigid material constructs, we employ conductive liquid and elastomeric constructs as the sensing medium-a design which is very responsive to applied pressure. A prototyped sensor achieves a sensitivity...
A design of barometric pressure sensor is presented in this paper, which is compatible with the standard CMOS process, and can solve the problem of the electrode feed-through out of the sealed cavity at the same time. Both electrodes of the sensor are leaded from the top side of the chip. When the initial gap of both electrodes formed the capacitor is 0.5 μm, and the side length of the square membrane...
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