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This paper focuses on the design and analysis of RF MEMS metal contact switch with a π shaped cantilever beam operating in the frequency range from 4 to 12 GHz. The topology of the design is a modified cantilever beam to achieve a low pull-in voltage. The design was analyzed as a metal contact switch to ensure its operation from DC onwards. The design is modified in terms of thickness of the beam,...
This paper deals with the electro-mechanical and electro-magnetic model of an electro statically actuated RF MEMS switch, Simple 1-D model for pull-in voltage is presented, along with the 2-port equivalent circuit network representation used for series switch. The Mechanical, Electrostatic and Electromagnetic analysis of the designed miniature RF MEMS cantilever beam is performed using COVENTORWARE...
This paper describes the process, design the switch structures and simulate certain parameters to develop a high performance RF MEMS switch with low voltage, low loss and high isolation. The RF MEMS switches are series switches type and are designed using physical level approach by using 3D MEMS commercial software package, Intellisuite. These switch structures are first designed using 2D layout which...
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