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This paper presents the design and measurement of a high isolation gap RF MEMS (Micro-Electro-Mechanical System) metal-contact switch. The main idea is to have a high off-state separation gap by using a see-saw system. In the proposed device, a soft-metal beam can be used for mechanical operation since mechanical anchors are not solicited during movement. The switch toggles on either side of a pivot...
In this paper, we develop a physics-based theoretical modeling framework to predict the device lifetime defined by the dominant degradation mechanisms of RF microelectromechanical systems (MEMS) capacitive switches (i.e., dielectric charging) and varactors (i.e., creep), respectively. Our model predicts the parametric degradation of performance metrics of RF MEMS capacitive switches and varactors,...
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