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Contact bouncing is among the most critical phenomenon reducing RF-MEMS reliability. This paper shows that very simple changes in switch design permit suppression of contact bouncing upon closure. The proposed asymmetrical design gets two dimples in contact with substrate electrodes successively, instead of simultaneously. This helps the dissipation of kinetic energy and prevents contact re-opening...
Contact bouncing is among the most critical phenomenon reducing RF-MEMS reliability. This paper shows that very simple changes in switch design permit suppression of contact bouncing upon closure. The proposed asymmetrical design gets two dimples in contact with substrate electrodes successively, instead of simultaneously. This helps the dissipation of kinetic energy and prevents contact re-opening...
This paper presents the design and measurement of a high isolation gap RF MEMS (Micro-Electro-Mechanical System) metal-contact switch. The main idea is to have a high off-state separation gap by using a see-saw system. In the proposed device, a soft-metal beam can be used for mechanical operation since mechanical anchors are not solicited during movement. The switch toggles on either side of a pivot...
A new topology of high power handling RF MEMS switched capacitor is presented in this paper. The design has been optimized in order to get low sensitivity to mechanic stress and temperature while keeping a low pull-down voltage (17 V). Two MEMS switched capacitors have been fabricated in back-to-back configuration and results in a Cup=92 fF and Cdown=260 fF. The IP1 and the hold down power of the...
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