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A novel stretchable Micro-Electrode Array (MEA) for biomedical applications with robust spiraled interconnects and radial micro-grooves for cell alignment is presented, enabling the unique combination of alignment, mechanical stimulation, and electrical characterization of living cells. Many of the problems normally associated with the fabrication of interconnects and electrodes on stretchable PDMS...
In this paper, we demonstrated the detailed fabrication process of taper hollow metallic microneedle array through 2-layer SU-8 thick photoresist based backside exposure and Nickel electroplating techniques. We got microneedles with length in the range of 300 μm to 450 μm, and sharp tips with cone angles in the range of 4.6° to 5.7°. It was found that backside exposure through transparent glass substrate...
A microfabricated pillar array separation column which has a comparable theoretical plate number to the conventional packed column was fabricated on a silicon chip. The column has a folded separation microchannel with compensated narrow curve structures which have inner and outer paths of the same length. This geometry minimizes the turn-induced band broadening and achieves high separation efficiency...
This paper demonstrates a novel flexible carbon nanotubes (CNTs) electrode array for neural recording. In this device, the CNTs electrode arrays are partially embedded into the flexible Parylene-C film using a batch microfabrication process. Through this fabrication process, the CNTs can be exposed to increase the total sensing area of an electrode. Thus, the flexible CNTs electrode of low impedance...
Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors on flexible substrates, none of the sensors have been integrally fabricated on the substrate. Fabricating MEMS sensors on flexible substrates along with display elements will provide new sensing capabilities and enhance functionality. We propose...
In this study, isotropic wet etching technology has been developed to achieve the pyramidal needle structures on one side polished chemical pure titanium substrate. Different etchants, mask materials and substrate materials combinations were investigated respectively for process optimization. A steady etch rate in excess of 2 mum/min has been achieved with sputtered Ni mask. For the first time, bulk...
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