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In this paper we present wafer-level heterogeneous integrated hidden-hinge micro-mirror arrays for adaptive optics applications. The micro-mirrors are made of mono-crystalline silicon and fabricated by two cycles of adhesive wafer bonding on fan-out substrates with addressing electrodes. The fabrication scheme allows the down-scaling of the micro-mirrors in size, the up-scaling of the array size and...
Textured n-side-up GaN LEDs with interdigitated imbedded electrodes (IIEs), high-reflection mirror, and double-side roughening on both p-GaN and undoped-GaN layers are investigated. The IIE structure can eliminate electrode shading. The epitaxial layers of the devices are grown on (0001) sapphire substrates by metal-organic chemical vapor deposition. The devices are subsequently fabricated with wafer...
In this work, a micro focusing deformable mirror is designed for fabricated by combination with silicon and nonsilicon based micromachining. The upper electrode and mirror is designed and made by traditional silicon based micromachining in silicon substrate. And lower electrode is fabricated at aluminum substrate. However, the lower electrode is fabricated by nonsislicon based micromachining. From...
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