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In this paper, the microwave performance of coplanar waveguides (CPWs) fabricated on high-resistivity silicon (HRS) substrates with various polysilicon film thicknesses was investigated. CPWs were fabricated on p-type silicon substrates with resistivities of 6000-8000 ??-cm. Polysilicon films with thicknesses ranging from 100 to 900 nm were deposited by LPCVD, in which a 300 nm-deposited polysilicon...
An optimization scheme for minimizing substrate losses in coplanar strips (CPS) transmission line on CMOS grade low resistivity silicon substrate with SU-8 polymer as dielectric interface layer, is presented. It is shown that through careful selection of CPS linewidth, the substrate losses can be sufficiently reduced for a given dielectric layer thickness. For a 100 ?? CPS line with SU-8 polymer as...
This paper presents low loss CPW (Co-Planar Waveguide) and microstrip via transitions on LCP (Liquid Crystal Polymer) substrate. The CPW transition using 105 mum via holes on a 4 mil LCP shows virtually no loss up to 25 GHz and about 0.13 dB of loss per transition at 40 GHz. The microstrip transition has no loss up to 15 GHz and approximately 0.5 dB of loss per transition at 30 GHz. In addition, the...
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