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Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 424 - 435
2008 International Semiconductor Conference > 1 > 173 - 176
Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 424 - 435
2008 International Semiconductor Conference > 1 > 173 - 176