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This study based on piezo-electric sensing principle to develop a high S/N ratio MEMS microphone. The patterned PZT and electrodes designed implemented above the clamped diaphragm to generate high stress concentration on PZT and Si bimorph diaphragm. The proposed central-circle electrode design can induce more charge than the edge-surrounded electrode design (served as the reference design). The proposed...
A novel method to apply thin metal film for preventing footing effect in making micro-mechanical structure on SOI wafer is presented. The handle wafer of the SOI wafer was etched to form cavity by KOH solution, and followed by removing the buried oxide from backside. Then a thin aluminum film was sputtered in the cavity to prevent footing effect. The experimental results showed that the SOI micro-mechanical...
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