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In the present paper, the design and simulation of square diaphragm, MEMS piezoresistive pressure sensor for intracranial application has been presented. The pressure sensor design presented in this paper consists of a carbon nanotube (CNT) suspended on a square and slotted shaped diaphragm as piezoresistor. The slot was added into the design of the square diaphragm to reduce the residual stress and...
In this paper, the design and analysis of diaphragm based Micro-Electro-Mechanical Systems (MEMS) sensor for environmental applications is presented. Performance parameters like the maximum induced stress, deflection and sensitivity of the diaphragms have been compared using the INTELLISUITE software. In order to increase the sensitivity of pressure sensor, the membrane needs to be either thin or...
The application of MEMS to the measurement of pressure is a mature application of micromachined silicon mechanical sensors. The present paper describes the design and simulation of surface micromachined piezo resistive type pressure sensor for enhanced sensitivity. The principle of the sensing mechanism is based on the deflection of sensing silicon nitride diaphragm. In order to achieve better sensor...
This study reports a CMOS-MEMS condenser microphone implemented using the standard thin films stacking of 0.35µm UMC CMOS 3.3/5.0V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, silicon...
We develop a novel MEMS microphone with a wide dynamic range. The microphone has two channels and consists of two condensers, a single diaphragm and a backplate. Each channel has a different role. The Normal channel has higher sensitivity and an intermediate dynamic range, whereas the High channel has lower sensitivity and a higher dynamic range. By switching the two channels to correspond to sound...
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