The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
We report on small, low-ohmic RF MEMS switches with a circular membrane actuator design. A low temperature process is used to manufacture both the MEMS switch as well as its hermetic, thin-film package resulting in a very small footprint device. The hermetic seal of the package significantly increases the switch lifetime and reliability. The switches demonstrate good RF performance and high switching...
Here we present a new technique to monitor dynamic conformational changes in voltage-sensitive membrane-bound proteins using radio frequency (RF) impedance measurements. Xenopus oocytes were transfected to express ShakerB-IR K+ ion channels, and step changes in membrane potential were applied using two-electrode voltage clamp (TEVC). Simultaneously, bipolar extracellular electrodes were used to measure...
Thermal-based ablation for the treatment of arrhythmias is known to cause issues (e.g. heat loss due to blood perfusion, mechanical damage of the tissue from excessive heat, etc.) that hamper the success of the treatment. A novel technique termed ldquoelectroporationrdquo is a process that leads to pore formation in cell membranes. These pores may cause cellular death without inducing negative thermal...
A compact model is proposed to facilitate the design and simulation of the control waveform of RF microelectromechanical systems (MEMS) capacitive switches with electrostatically actuated membranes. Following conventional approaches, the pull-in motion of a membrane is simulated by an L-R-C network. However, the present model deviates from conventional approaches by adding another capacitor and a...
A novel DC-contact series RF MEMS switch using Al/Au composite membrane bridge is present. The warping problem of cantilever beam under residual stress is avoided by introduction of the slanting beam. Au-Au direct contact is achieved by using Al/Au composite membrane. The process is based on Borofloat?? glass substrate and resistance is used to isolate the crosstalk between the RF signal and DC driven...
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5 V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements...
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V). This design presents also a good contact force and improves the restoring force of the structure. As an example of application,...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.