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Radio Frequency (RF) Microelectromechanical system (MEMS) switches are becoming more and more popular in the electronics industry. The main concern in using RF MEMS switch is its high actuation voltage. Thus the main focus in this paper is to obtain low actuation voltage. This paper presents the simulation and analysis of RF MEMS cantilever beam and Fixed – Fixed beam switches. RF MEMS switches simulated...
A metal contact RF MEMS switch based on single crystal silicon is presented in this article. Performance of the switch is demonstrated numerically in simulations. The mN-level contact and release forces are achieved. Pull-in voltage is calculated to be 40V. 1.5mN contact force and 1.2mN release force are achieved when actuation voltage is 50V. The isolation and insertion loss are better than −30.8dB...
This paper presents the design and testing results of an electrothermally driven MEMS (microelectromechanical systems) actuator. Different from conventional uni-directional thermal actuators, this in-plane bi-directional electrothermal actuator is capable of producing displacements in two directions as a single device. The RF MEMS switch driven by this cascaded electrothermal actuator is also proposed...
This paper presents a new type of thermally actuated switch for wireless communication system operated at low gigahertz frequencies. The switch is driven by a metal electrothermal actuator, which can generate large displacement and high contact force at lower temperatures. The MEMS switch utilizing the parallel four-beam actuator requires driving voltage of 0.07 V for an 8 μm displacement. RF performances...
This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V). This design presents also a good contact force and improves the restoring force of the structure. As an example of application,...
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