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Micro Electro Mechanical Systems (MEMS) Switches have become very popular in the Electronics industry and we need to carefully select beam material and structural parameters for reliability and better performance. A variety of materials can be used as beam material in RF MEMS switches. The cantilever beam is used to change the state of RF switch and for actuation is made mostly using aluminum, copper,...
The fixed-fixed beam in RF switches fabricated by MEMS techniques of a sacrificial layer is inclined to stick to the substrate due to the significant capillary force during drying process. In this paper, sticking models of the fixed-fixed beam are investigated to analyze the sticking effect. Based on these models, an adhesion criterion hc for the fixed-fixed beam is derived to determine whether the...
The mechanical response of a RF MEMS shunt connected switch in coplanar waveguide configuration has been studied by using both an analytical approach based on uni-dimensional equations and FEM simulations. The analytical model has been developed for predicting the dynamics of the device, especially concerning its re-configuration time and the energy balance involved in the actuation and in the de-actuation...
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