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RF MEMS devices utilized micromachining technologies offer a high performance to several RF applications. They receive increasingly attentions in microwave researchers and engineers in the recent years. This paper includes two parts. In the first part, a brief review of RF MEMS is presented. In the second part, some research work of the author's group on RF MEMS technology is introduced.
The influence of the suspension shape on the electrical parameters and on the reliability of micro-machined ohmic series and shunt RF switches has been studied in this work. We have investigated how different spring constants influence the electrical parameters of RF-MEMS switches, in terms of the pull-in voltage, the pull-out voltage, and the evolution of scattering parameters during the DC sweep...
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