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In this paper, we present the effects of diaphragm design parameters on the sensitivity of acoustic sensor used for condition monitoring purpose. We have considered different design parameters of the diaphragm such as shape, dimensions, thickness, type of the piezoelectric material of the diaphragm. We studied the effect of changes in these parameters on the deflection, stress, strain, voltage generated...
This paper presents two newly developed models of capacitive silicon bulk acoustic resonators (SiBARs) characterized by a rectangular-bar geometry. The first model is derived from an approximate analytical solution of the linear elastodynamic equations for a parallelepiped made of an orthotropic material. This solution, which is recognized to represent a Lamb wave propagating across the width of the...
In this paper investigations for the non-destructive characterization of MEMS (Micro-Electro-Mechanical- Systems) are presented that can be applied in the production monitoring in early stages. Different aspects and experimental results are shown for silicon membrane structures with artificial faults. The structures were characterized by their resonant frequencies and associated mode shapes measured...
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