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We experimentally demonstrate the use of simple MEMS microcantilevers as an efficient way to achieve dynamic manipulation of terahertz waves. An array of subwavelength sized microcantilevers acts as metamaterial, which can be electrostatically tuned to provide active control of light-matter interaction. The proposed metamaterial shows tuning range of 0.3 THz, which is further improved to 0.36 THz,...
This paper demonstrates the first tests of friction, adhesion, and wear properties of thin poly(dimethylsiloxane) (PDMS) films deposited on the sidewalls of silicon-on-insulator structures. The curves of coefficient of friction versus normal pressure were obtained for PDMS-on-PDMS, PDMS-on-silicon, and silicon-on-silicon sidewall interfaces. Tests were also completed to evaluate the effects of aging...
This paper reports on the theory, implementation and experimental results of a novel method used to identify the coupling forces ratio in MEMS vibratory gyroscopes. This identification method is based on the force-displacement phase relationships in second-order spring-mass system and fourth-order coupling system. Experimental data under different temperature and vacuum indicates that the sensitivity...
This paper deal with a new symmetrical and Decoupled Silicon Micro-Gyroscope (DSMG). By the simplified motion model of the DSMG, the mechanical coupling error from the width errors of suspension beams is analyzed and deduced. The simulation shows that the simulated results of mechanical coupling error basically equal to the calculation results. The characterization test results of the DSMG show that...
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