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This work presents a self-controlled nano-precision top-down fabrication technique for batch fabrication of single crystalline silicon nanobeams and incorporation of such in electromechanical devices and systems. The fabrication technique takes advantage of the crystalline structure of silicon for the ultimate self-alignment and self-control leading to extremely smooth sidewalls, sharp corners, and...
MEMS resonators are promising as micromechanical oscillators and filters in wireless communication systems. This paper reports on the fabrication and characterization of single crystal silicon (SCS) disk resonators with sub-micro capacitive gaps. Vertical capacitive gaps as small as 100 nm have been demonstrated in this work. High frequency disk resonators have been implemented and tested.
We report on the experimental characterization of a single crystal silicon square-plate microresonator. The resonator is excited in the square wine glass (SWG) mode at a mechanical resonance frequency of 2.065 MHz. The resonator displays quality factor of 9660 in air and an ultra-high quality factor of Q = 4.05 times 106 in 12 mtorr vacuum. The SWG mode may be described as a square plate that contracts...
In a rigorous design study of silicon-in-silica waveguides and resonators we address critical parameters for tunable filters. 6:1 aspect-ratio TE and 2:1 TM waveguide designs optimize resonance-frequency dimensional tolerances, proximate metal-electrode loss and other constraints.
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