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The design and implementation of a CMOS integrated analog to digital interface dedicated to hybrid integration of MEMS resistive microphone is presented. Audio sensing is achieved with an innovative low-cost technology that uses single crystal piezoresistive silicon nanowires as transducer in a MEMS. The circuit composed of a low-noise instrumentation preamplifier followed by a single bit fourth order...
This paper describes the conception, designs consideration and fabrication process of a novel MEMS microphone. The presented microphone not only uses a new architecture, the sensitive part being beams moving within the plane of the substrate, but also uses an innovative detection means with Silicon piezo-resistive nanogauges. Modelization will consider acoustic and mechanical interactions. Besides,...
This paper reports on the state of the art silicon micromachined microphone utilizing a dual poly silicon membrane system. MEMS chips from 1.4mm down to 1.0mm side length are applied for mobile communication. Design aspects related with key performance parameters such as sensitivity, signal to noise ration and distortion are discussed. Sensitivity of − 38BV/Pa is achieved for different microphone...
Silicon MEMS microphones that offer small size, ease of integration with CMOS electronics, and the ability to withstand lead-free solder reflow cycles, are becoming increasingly popular for high-volume consumer electronic products, and are competing in price and performance with traditional electret condenser microphones. The design of a MEMS microphone, consisting of a compliant membrane and a stiff...
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