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In this paper, a platinum thin film thermal flow sensor was presented. Design, fabrication process and thermal analysis were presented and discussed. Compared with traditional structure of four supporting beams, the present structure can provide high sensitivity and good strength because of the unique thermal and mechanical design. The sizes of the flow sensor chip are 571 μ m × 280 μ m × 0.25 μ m...
RFID system to detect oil degradation was developed in this study. For detecting oil state, capacitive IDT (Inter -Digit Type) sensor was fabricated with MEMS process, and passive type RFID has no power source itself. The power to operate sensor and circuit was provided from RFID reader using low frequency 125 kHz. The engine oil based mineral oil was periodically extracted from a vehicle for as experimental...
We present a proof-of-concept MEMS affinity sensor that measures the changes in dielectric properties of poly(acrylamide-ran-3-acrylamidophenylboronic acid) (PAA-ran-PAAPBA) polymer due to its specific, reversible binding with glucose. This sensor comprises capacitive electrodes sandwiching a solution of PAA-ran-PAAPBA polymer. Binding with glucose induces changes in the permittivity of the polymer,...
This paper presents the thermal analysis and characterization of a zinc oxide (ZnO) based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments for biosensing applications. Q of up to 120, an improvement of at least 8times greater than state-of-the-art devices in liquids, are achieved by integrating microfluidic channels with heights comparable to the acoustic...
This work presents the design and characterization of a CMOS-integrated thermal sensor that features a novel oscillator-based sensing interface to achieve a high thermoelectric sensitivity. The thirty pairs of thermocouples are made of n+/p+ polysilicon of a standard 0.18-mum CMOS to produce a large thermoelectric voltage. The produced thermoelectric voltage is used to control the bias current of...
This paper deeply researches gas-pendulum theory and characteristic, and detailedly explains the character that micro-machined gas-pendulum tilt sensors can not only measure obliquity but also linear acceleration. This paper finds out the relation of sensing mechanism of micro-machined gas-pendulum sensors measuring obliquity and acceleration. According to the different principles between gas-pendulum...
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