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Micro-heat pipes incorporating advanced wicks are promising for the thermal management of high power density semiconductor and MEMS devices. We report experimental characterization of the heat transfer performance of wicks consisting of dense arrays of superhydrophilic Cu micropost wicks fabricated using electrochemical deposition and controlled chemical oxidation. A very high heat removal capability...
A new MEMS-based shear-stress sensor has been developed for skin-friction measurements in wind tunnel tests. This new sensor design utilizes polysilicon bridges on silicon substrate as heating and sensing elements, greatly simplifying the fabrication process and increases the yield by eliminating the silicon nitride diaphragm and vacuum cavity in conventional MEMS shear-stress sensors. Since the bridge...
This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600??C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The...
A control system to regulate the temperature of the micro hotplate in a MEMS gas sensor is presented. The controlelement, called micro hotplate, is comprised of a micro heater and a temperature sensor, both made with polysilicon, located near each other. This material has a Temperature Coefficient of Resistance (TCR) that is the basis for the design of the temperature controller of the gas sensor...
This paper introduces a class of single crystal silicon micro-scale differential scanning calorimeters for rapid detection and thermal characterization of energetic materials. The suspended membrane micro hotplates have fast time response and high sensitivity, which enables thermal measurements of melting endotherms and deflagration exotherms in energetic materials such as RDX and TNT. The potential...
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