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The development of a silicon-only capacitive dew point sensor is described in this paper. The principle of operation is based on the change in capacitance of an interdigitated parallel plate capacitor due to the condensation of water below dew point temperature. The proposed sensor element is simple in fabrication, with only one lithography step and no metal or polymer usage. The experiments show...
An interdigitated capacitive structure whose fingers have branches across them is described in this article. By changing the traditional interdigitated electrodes (IDE), the area where the sensor is defined can be reduced by a third, while its capacitance and sensitivity are maintained. This enhancement with respect to the traditional one is obtained thanks to the contribution to the capacitance not...
In the frame of a bilateral project Romania-Slovenia (partners: University ??Politehnica?? of Bucharest and ??Jozef Stefan?? Institute from Ljubljana) a capacitive pressure sensor with air using LTCC (low temperature co-fired ceramic) and thick-film materials and technologies was developed. After establishing the optimal dimensions from the point of view of the sensitivity as well as costs, question...
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