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Journal of Microelectromechanical Systems > 2017 > 26 > 2 > 456 - 463
TENCON 2010 - 2010 IEEE Region 10 Conference > 1948 - 1950
Journal of Microelectromechanical Systems > 2017 > 26 > 2 > 456 - 463
TENCON 2010 - 2010 IEEE Region 10 Conference > 1948 - 1950