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A two-step method is offered for the synthesis of vanadium oxide films to purposely change their functional properties. Vanadium oxide films were deposited on glass and silicon substrates by using magnetron sputtering of the vanadium target at various substrate temperatures (180–500°C). During deposition, the substrate temperature predetermines structural and functional properties of the films after...
Mo, Al 2 O 3 single layer, Mo–Al 2 O 3 granular cermet layer, Mo/Al 2 O 3 tandem and an optimized Mo–Al 2 O 3 multilayer coating with a double cermet layer configuration were deposited on stainless steel substrates by magnetron sputtering technique. The samples were annealed in vacuum at different temperatures ranging from 350 °C to 1000 °C...
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