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A two-step method is offered for the synthesis of vanadium oxide films to purposely change their functional properties. Vanadium oxide films were deposited on glass and silicon substrates by using magnetron sputtering of the vanadium target at various substrate temperatures (180–500°C). During deposition, the substrate temperature predetermines structural and functional properties of the films after...
Thermochromic VO 2 films were synthesized on glass substrates by reactive magnetron deposition (T dep =200°C) and following annealing (T ann =300°C). The proposed method of synthesis results in formation of the highly ordered monoclinical vanadium dioxide structure. The transition from the monoclinic to the tetragonal phase is accompanied by 50 times reduction of transmittance...
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