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This paper presents a novel approach in passive chipless wireless pressure sensing for tool monitoring in smart factories. The working principle is based on the pressure dependent detuning of a dielectric resonator resulting in a notch in the backscattered spectrum at its resonance frequency. The read-out of the sensor is performed by a reader device that transmits a broadband signal and makes use...
This paper reports a passively temperature-compensated dual-frequency micromachined resonator which has been experimentally demonstrated to perform accurate sensing of differential pressure. This resonating device incorporates passive temperature compensation techniques, different sub-resonator cavity structures and dual-resonance frequency property, all aimed at applying it in accurate pressure sensing...
Capacitive micromachined ultrasonic transducers (CMUTs) make extremely sensitive chemical sensors in air. In this work, we demonstrate a CMUT chemical sensor chip with integrated temperature and pressure sensors. These sensors allow the measurement of multiple environmental parameters using a single chip and allow the influence of temperature and pressure on the chemical sensors to be corrected for...
Pressure measurements provide reliable estimates of the reservoir pressure, permeability and oil/water interface in reservoirs that help in optimal completion of wells for oil and gas production. Pressure sensors with high accuracy, resolution, and fast response time are necessary for characterizing highly permeable reservoirs. High precision pressure sensors are generally, made of crystalline quartz...
In this paper, first experiments regarding characterization of the GaN based FBAR (Film Bulk Acoustic Resonator) structures as pressure sensors are presented. The FBAR structures have been manufactured on GaN/Si using advanced micromachining technologies. The experiments have demonstrated the excellent mechanical properties of 0.5 µm thin GaN membranes able to support a pressure of at least 5 Bar.
In this paper, the new and latest results relative to theoretical and experimental studies of an original passive electromagnetic micro-sensor for wireless pressure monitoring application are presented. This micro-sensor uses the electromagnetic transduction principle. The sensing element is a flexible high resistivity silicon membrane located above a coplanar quarter-wavelength resonator operating...
This paper presents the design, fabrication, package and tests of a novel resonant pressure sensor suitable for noncorrosive medium pressure measurements, based on electromagnetically driven and sensed H-type lateral beam resonators and stress isolated package. The resonant beams are exposed to the pressure media rather than working in vacuum. The design of the pressure sensor is optimized by FEA...
This paper presents a MEMS resonator-based vacuum sensor with a low-power transimpedance amplifier and a mixer-based frequency-to-digital converter. The MEMS resonator is fabricated in a CMOS-compatible process, and a 130 nm CMOS technology is used to design the integrated circuitry. The vacuum sensor operates in the pressure range from 10 to 1200 mbar with a resolution of ~2 mbar. The system is temperature-compensated...
An electromagnetically excited silicon nitride beam resonant pressure sensor is described and numerical modeling is carried out on the analysis of the sensitivity of pressure measurement and temperature drift. The proposed approach is based on measurement of resonant frequencies for two resonant beams located on a diaphragm inducing different axial stress under an applied pressure, the differential...
This paper deals with the performance improvement of a resonant pressure sensor designed for MHz range and realised in the LTCC (low temperature co-fired ceramics) technology. A new upgraded and modified sensor model residing on an analytical concept is demonstrated. Based on this model, sensitivity of the sensor could be drastically increased only by a change of the cylindrical cavity radius which...
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